Authors

Gronheid, Roel; Vaglio Pret, Alessandro; Rathsack, Benjamin; Hooge, Joshua; Scheer, Steven; Nafus, Kathleen; Shite, Hideo; Kitano, Junichi

ISSN

1537-1646

Issue

1

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

10

Title

Resolution-linewidth roughness-sensitivity performance tradeoffs for an extreme ultraviolet polymer bound photo-acid generator resist

Publication type

Journal article

Embargo date

9999-12-31