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Resolution-linewidth roughness-sensitivity performance tradeoffs for an extreme ultraviolet polymer bound photo-acid generator resist
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1977 since deposited on 2021-10-19
2last month
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Acq. date: 2026-01-10
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1977 since deposited on 2021-10-19
2last month
1last week
Acq. date: 2026-01-10
Citations