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Deposition of nanodiamond-graphite-like films with a microwave electron-cyclotron resonance process

dc.contributor.authorGushchin, Oleg
dc.contributor.authorOrlov, Sergey
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorYanovich, Sergey
dc.contributor.authorYafarov, Ravil
dc.contributor.authorIgnatov, Ravel
dc.contributor.authorZaitsev, Nikolay
dc.date.accessioned2021-10-19T14:04:14Z
dc.date.available2021-10-19T14:04:14Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19025
dc.sourceIIOimport
dc.titleDeposition of nanodiamond-graphite-like films with a microwave electron-cyclotron resonance process
dc.typeMeeting abstract
dc.source.peerreviewno
dc.source.conferenceNanotechitaly
dc.source.conferencedate23/11/2011
dc.source.conferencelocationVenice Italy
imec.availabilityPublished - imec


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