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Structural and electrical characterization of carbon nanotube interconnects by combined transmission electron microscopy and scanning spreading resistance microscopy

dc.contributor.authorHantschel, Thomas
dc.contributor.authorKe, Xiaoxing
dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorSchulze, Andreas
dc.contributor.authorBender, Hugo
dc.contributor.authorEyben, Pierre
dc.contributor.authorBals, Sara
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-19T14:08:28Z
dc.date.available2021-10-19T14:08:28Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19040
dc.sourceIIOimport
dc.titleStructural and electrical characterization of carbon nanotube interconnects by combined transmission electron microscopy and scanning spreading resistance microscopy
dc.typeProceedings paper
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1349-dd04.09
dc.source.conferenceQuantitative Characterization of Nanostructured Materials
dc.source.conferencedate25/04/2011
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Symposium Proceedings; Vol. 1349


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