Authors

Hantschel, Thomas; Ke, Xiaoxing; Chiodarelli, Nicolo; Schulze, Andreas; Bender, Hugo; Eyben, Pierre; Bals, Sara; Vandervorst, Wilfried

Conference

Quantitative Characterization of Nanostructured Materials

Title

Structural and electrical characterization of carbon nanotube interconnects by combined transmission electron microscopy and scanning spreading resistance microscopy

Publication type

Proceedings paper

Embargo date

9999-12-31