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Structural and electrical characterization of carbon nanotube interconnects by combined transmission electron microscopy and scanning spreading resistance microscopy

Date

2011
Proceedings Paper
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dc.contributor.authorHantschel, Thomas
dc.contributor.authorKe, Xiaoxing
dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorSchulze, Andreas
dc.contributor.authorBender, Hugo
dc.contributor.authorEyben, Pierre
dc.contributor.authorBals, Sara
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned2021-10-19T14:08:28Z
dc.date.available2021-10-19T14:08:28Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19040
dc.source.beginpage1349-dd04.09
dc.source.conferenceQuantitative Characterization of Nanostructured Materials
dc.source.conferencedate25/04/2011
dc.source.conferencelocationSan Francisco, CA USA
dc.title

Structural and electrical characterization of carbon nanotube interconnects by combined transmission electron microscopy and scanning spreading resistance microscopy

dc.typeProceedings paper
dspace.entity.typePublication
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