Publication:

Increasing DOF for VIA lithography using a non-CMP based architecture

Date

1997

Proceedings Paper

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Author(s)

Grozev, Grozdan

;

Waeterloos, Joost

;

;

Van den hove, Luc

;

Tzviatkov, Plamen

Statistics

1898 since deposited on 2021-09-30

Acq. date: 2026-02-25