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A CMOS-compatible 20MHz poly-SiGe MEMS oscillator with low-power heating for frequency stabilization over temperature

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1927 since deposited on 2021-10-19
2last month
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Acq. date: 2026-08-09

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1927 since deposited on 2021-10-19
2last month
1last week
Acq. date: 2026-08-09

Citations