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A CMOS-compatible 20MHz poly-SiGe MEMS oscillator with low-power heating for frequency stabilization over temperature

dc.contributor.authorJansen, Roelof
dc.contributor.authorLibois, Michael
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorLofrano, Melina
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorSeveri, Simone
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.contributor.authorDonnay, Stephane
dc.contributor.authorBorremans, Jonathan
dc.date.accessioned2021-10-19T14:32:46Z
dc.date.available2021-10-19T14:32:46Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19121
dc.sourceIIOimport
dc.titleA CMOS-compatible 20MHz poly-SiGe MEMS oscillator with low-power heating for frequency stabilization over temperature
dc.typeProceedings paper
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorLibois, Michael
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorLofrano, Melina
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDonnay, Stephane
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDonnay, Stephane::0000-0003-2489-4793
dc.source.peerreviewno
dc.source.conferenceIEEE International Frequency Control Symposium
dc.source.conferencedate1/05/2011
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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