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Novel bi-layer poly-silicon channel vertical flash cell for ultrahigh density 3D sonos nand technology

dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorCacciato, Antonio
dc.contributor.authorBlomme, Pieter
dc.contributor.authorArreghini, Antonio
dc.contributor.authorBreuil, Laurent
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorVrancken, Christa
dc.contributor.authorDouhard, Bastien
dc.contributor.authorRichard, Olivier
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorVan Houdt, Jan
dc.contributor.authorVan Aerde, Steven
dc.contributor.authorTang, Baojun
dc.date.accessioned2021-10-19T14:44:43Z
dc.date.available2021-10-19T14:44:43Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19159
dc.sourceIIOimport
dc.titleNovel bi-layer poly-silicon channel vertical flash cell for ultrahigh density 3D sonos nand technology
dc.typeProceedings paper
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorBlomme, Pieter
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.imecauthorVan Aerde, Steven
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage65
dc.source.endpage68
dc.source.conference3rd IEEE International Memory Workshop - IMW
dc.source.conferencedate22/05/2011
dc.source.conferencelocationMonterey, CA USA
imec.availabilityPublished - open access


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