Authors

Kesters, Els; Le, Quoc Toan; Lux, Marcel; Vereecke, Guy; Struyf, Herbert; De Gendt, Stefan

Conference

Electrochemical Society Fall Meeting Symposium E7 - Semiconductor Cleaning Science and Technology 12 - SCST

Title

PR and BARC wet strip in BEOL patterning using a UV-enabled aqueous process

Publication type

Meeting abstract