Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Anisotropic etching of inverted pyramids in the sub-100 nm region
Publication:
Anisotropic etching of inverted pyramids in the sub-100 nm region
Copy permalink
Date
1997
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
1890.pdf
270.91 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hantschel, Thomas
;
Vandervorst, Wilfried
Journal
Microelectronic Engineering
Abstract
Description
Metrics
Views
1934
since deposited on 2021-09-30
Acq. date: 2026-01-11
Citations
Metrics
Views
1934
since deposited on 2021-09-30
Acq. date: 2026-01-11
Citations