Stiction-free poly-SiGe resonant biosensors for monolithic integration with CMOS

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Authors
Lenci, Silvia; Pieri, Francesco; Haspeslagh, Luc; De Coster, Jeroen; Decoutere, Stefaan; Maestre Caro, Arantxa; Armini, Silvia; Witvrouw, Ann
Conference
16th International Solid-State Sensors, Actuators and Microsystems Conference - TRANSDUCERS
Title
Stiction-free poly-SiGe resonant biosensors for monolithic integration with CMOS
Publication type
Proceedings paper
Embargo date
9999-12-31
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