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Stiction-free poly-SiGe resonant biosensors for monolithic integration with CMOS

dc.contributor.authorLenci, Silvia
dc.contributor.authorPieri, Francesco
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorMaestre Caro, Arantxa
dc.contributor.authorArmini, Silvia
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-19T15:21:29Z
dc.date.available2021-10-19T15:21:29Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19270
dc.sourceIIOimport
dc.titleStiction-free poly-SiGe resonant biosensors for monolithic integration with CMOS
dc.typeProceedings paper
dc.contributor.imecauthorLenci, Silvia
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2136
dc.source.endpage2139
dc.source.conference16th International Solid-State Sensors, Actuators and Microsystems Conference - TRANSDUCERS
dc.source.conferencedate5/06/2011
dc.source.conferencelocationBeijing China
imec.availabilityPublished - open access


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