Authors

Molle, Alessandro; Lamagna, Luca; Wiemer, Claudia; Spiga, Sabina; Fanciulli, Marco; Merckling, Clement; Brammertz, Guy; Caymax, Matty

ISSN

1882-0778

Issue

9

Journal

Applied Physics Express

Volume

4

Title

Improved performance of In0.53Ga0.47As-based metal-oxide-semiconductor capacitors with Al:ZrO2 gate dielectric grown by atomic layer deposition

Publication type

Journal article