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Microstructural studies of Co silicide layers formed on SiGe and SiGeC

dc.contributor.authorJin, S.
dc.contributor.authorBender, Hugo
dc.contributor.authorDonaton, R. A.
dc.contributor.authorMaex, Karen
dc.contributor.authorVantomme, Andre
dc.contributor.authorLangouche, G.
dc.contributor.authorSt. Amour, A.
dc.contributor.authorSturm, J. C.
dc.date.accessioned2021-09-30T08:30:41Z
dc.date.available2021-09-30T08:30:41Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1954
dc.sourceIIOimport
dc.titleMicrostructural studies of Co silicide layers formed on SiGe and SiGeC
dc.typeProceedings paper
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorVantomme, Andre
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage481
dc.source.endpage486
dc.source.conferenceStructure and Evolution of Surfaces
dc.source.conferencedate2/12/1996
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Symposium Proceedings; Vol. 440


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