Authors

Paul, Abhijeet; Tettamanzi, Giuseppe C.; Lee, Sunhee; Mehrotra, Saumitra; Collaert, Nadine; Biesemans, Serge; Rogge, Sven; Klimeck, Gerard

DOI

10.1063/1.3660697

ISSN

0021-8979

Issue

12

Journal

Journal of Applied Physics

Volume

110

Title

Interface trap density metrology from sub-threshold transport in highly scaled undoped Si n-FinFETs

Publication type

Journal article