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Post-bonding fabrication of photonic devices in an indium phosphide membrane bonded on glass

dc.contributor.authorPello, J.
dc.contributor.authorSaboya, P.
dc.contributor.authorKeyvaninia, Shahram
dc.contributor.authorvan der Tol, J.J.G.M.
dc.contributor.authorRoelkens, Gunther
dc.contributor.authorAmbrosius, H.P.M.M.
dc.contributor.authorSmit, M.K.
dc.date.accessioned2021-10-19T17:12:17Z
dc.date.available2021-10-19T17:12:17Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19555
dc.sourceIIOimport
dc.titlePost-bonding fabrication of photonic devices in an indium phosphide membrane bonded on glass
dc.typeProceedings paper
dc.contributor.imecauthorRoelkens, Gunther
dc.contributor.orcidimecRoelkens, Gunther::0000-0002-4667-5092
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage213
dc.source.endpage216
dc.source.conferenceProceedings of the Annual Symposium of the IEEE Photonics Benelux Chapter
dc.source.conferencedate1/12/2011
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - open access


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