Thin MEMS packages obtained by a novel collective cap transfer process

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Authors
Phommahaxay, Alain; Bogaerts, Lieve; Naito, Yasuyuki; Van Cauwenberghe, Marc; Tutunjyan, Nina; Onishi, Keiji; Tilmans, Harrie
Conference
Eurosensors XXV
Title
Thin MEMS packages obtained by a novel collective cap transfer process
Publication type
Proceedings paper
Embargo date
9999-12-31
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