Publication:

Thin MEMS packages obtained by a novel collective cap transfer process

Date

2011

Proceedings Paper

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Files

22727.pdf 705.01 KB

Author(s)

Phommahaxay, Alain

;

Bogaerts, Lieve

;

Naito, Yasuyuki

;

Van Cauwenberghe, Marc

;

Tutunjyan, Nina

;

;

Tilmans, Harrie

Metrics

1904 since deposited on 2021-10-19

Acq. date: 2026-01-08