Authors

Redolfi, Augusto; Sleeckx, Erik; Devriendt, Katia; Shamiryan, Denis; Vandeweyer, Tom; Horiguchi, Naoto; Togo, Mitsuhiro; Wouters, Johan M. D.; Jurczak, Gosia; Hoffmann, Thomas Y.; Cockburn, Andrew; Gravey, Virginie; Diehl, D.L.

Conference

12th International Conference on Ultimate Integration on Silicon - ULIS

Title

Bulk FinFET fabrication with new approaches for oxide topography control using dry removal techniques

Publication type

Proceedings paper

Embargo date

9999-12-31