Authors

Rottenberg, Xavier; Jansen, Roelof; Verheyen, Peter; Van Hoof, Rita; Verbist, Agnes; Tilmans, Harrie

Conference

16th International Conference on Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS

Title

Engineering of acoustic meta-materials with application to MEMS BAW resonators

Publication type

Proceedings paper

Embargo date

9999-12-31