dc.contributor.author | Rottenberg, Xavier | |
dc.contributor.author | Jansen, Roelof | |
dc.contributor.author | Verheyen, Peter | |
dc.contributor.author | Van Hoof, Rita | |
dc.contributor.author | Verbist, Agnes | |
dc.contributor.author | Tilmans, Harrie | |
dc.date.accessioned | 2021-10-19T18:19:08Z | |
dc.date.available | 2021-10-19T18:19:08Z | |
dc.date.issued | 2011-06 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19712 | |
dc.source | IIOimport | |
dc.title | Engineering of acoustic meta-materials with application to MEMS BAW resonators | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Rottenberg, Xavier | |
dc.contributor.imecauthor | Jansen, Roelof | |
dc.contributor.imecauthor | Verheyen, Peter | |
dc.contributor.imecauthor | Van Hoof, Rita | |
dc.contributor.imecauthor | Tilmans, Harrie | |
dc.contributor.orcidimec | Jansen, Roelof::0000-0001-6685-4699 | |
dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 930 | |
dc.source.endpage | 933 | |
dc.source.conference | 16th International Conference on Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS | |
dc.source.conferencedate | 5/06/2011 | |
dc.source.conferencelocation | Beijing China | |
imec.availability | Published - open access | |