Resistance and capacitance measurements of the films deposited on a planar Langmuir probe

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Authors
Samara, Vladimir; Brouri, Mohand; de Marneffe, Jean-Francois; Milenin, Alexey; Boullart, Werner
Conference
64th Gaseous Electronics Conference
Title
Resistance and capacitance measurements of the films deposited on a planar Langmuir probe
Publication type
Proceedings paper
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