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Resistance and capacitance measurements of the films deposited on a planar Langmuir probe

dc.contributor.authorSamara, Vladimir
dc.contributor.authorBrouri, Mohand
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorMilenin, Alexey
dc.contributor.authorBoullart, Werner
dc.date.accessioned2021-10-19T18:23:14Z
dc.date.available2021-10-19T18:23:14Z
dc.date.issued2011-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19722
dc.sourceIIOimport
dc.titleResistance and capacitance measurements of the films deposited on a planar Langmuir probe
dc.typeProceedings paper
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorMilenin, Alexey
dc.contributor.imecauthorBoullart, Werner
dc.contributor.orcidimecMilenin, Alexey::0000-0003-0747-0462
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.source.peerreviewno
dc.source.conference64th Gaseous Electronics Conference
dc.source.conferencedate14/11/2011
dc.source.conferencelocationSalt Lake City, UT USA
imec.availabilityPublished - imec


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