ALD Ru and its applications in DRAM MIM-capacitors and interconnect

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Authors
Schaekers, Marc; Swerts, Johan; Altimime, Laith; Tokei, Zsolt
Conference
China Semiconductor Technology International Conference - CSTIC
Title
ALD Ru and its applications in DRAM MIM-capacitors and interconnect
Publication type
Proceedings paper
Embargo date
9999-12-31
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