dc.contributor.author | Schaekers, Marc | |
dc.contributor.author | Swerts, Johan | |
dc.contributor.author | Altimime, Laith | |
dc.contributor.author | Tokei, Zsolt | |
dc.date.accessioned | 2021-10-19T18:30:58Z | |
dc.date.available | 2021-10-19T18:30:58Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19740 | |
dc.source | IIOimport | |
dc.title | ALD Ru and its applications in DRAM MIM-capacitors and interconnect | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Schaekers, Marc | |
dc.contributor.imecauthor | Swerts, Johan | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.orcidimec | Schaekers, Marc::0000-0002-1496-7816 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 509 | |
dc.source.endpage | 514 | |
dc.source.conference | China Semiconductor Technology International Conference - CSTIC | |
dc.source.conferencedate | 13/03/2011 | |
dc.source.conferencelocation | Shanghai China | |
imec.availability | Published - open access | |
imec.internalnotes | ECS Transactions; Vol. 34, Issue 1 | |