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SiGe MEMS process design kit for MEMS-IC design

dc.contributor.authorSchröpfer, Gerold
dc.contributor.authorLorenz, Gunar
dc.contributor.authorDonnay, Stephane
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorJansen, Roelof
dc.contributor.authorBienstman, Jan
dc.date.accessioned2021-10-19T18:34:23Z
dc.date.available2021-10-19T18:34:23Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19748
dc.sourceIIOimport
dc.titleSiGe MEMS process design kit for MEMS-IC design
dc.typeOral presentation
dc.contributor.imecauthorDonnay, Stephane
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorJansen, Roelof
dc.contributor.orcidimecDonnay, Stephane::0000-0003-2489-4793
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecRottenberg, Xavier::0000-0003-0920-1709
dc.source.peerreviewno
dc.source.conferenceCDNLive! EMEA
dc.source.conferencedate3/05/2011
dc.source.conferencelocationMünchen Germany
imec.availabilityPublished - imec


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