A DLTS study of SiO2 and SiO2/SiNx surface passivation of silicon

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Authors

Simoen, Eddy; Gong, Chun; Posthuma, Niels; Van Kerschaver, Emmanuel; Poortmans, Jef; Mertens, Robert

ISSN

0013-4651

Issue

6

Journal

Journal of the Electrochemical Society

Volume

158

Title

A DLTS study of SiO2 and SiO2/SiNx surface passivation of silicon

Publication type

Journal article

Embargo date

9999-12-31

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