Authors

Heyns, Marc; Meuris, Marc; Verhaverbeke, Steven; Mertens, Paul; Schmidt, Harald; Rotondaro, Antonio; Hurd, Trace; Hatcher, Z.; Gräf, D.

Conference

Proceedings of the International Conference on Advanced Microelectronic Devices and Processing - AMDP

Title

Cleaning technology for highly reliable gate oxides

Publication type

Proceedings paper

Embargo date

9999-12-31