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Cleaning technology for highly reliable gate oxides
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Authors
Heyns, Marc
;
Meuris, Marc
;
Verhaverbeke, Steven
;
Mertens, Paul
;
Schmidt, Harald
;
Rotondaro, Antonio
;
Hurd, Trace
;
Hatcher, Z.
;
Gräf, D.
Conference
Proceedings of the International Conference on Advanced Microelectronic Devices and Processing - AMDP
Title
Cleaning technology for highly reliable gate oxides
Publication type
Proceedings paper
Embargo date
9999-12-31
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