Publication:

Cleaning technology for highly reliable gate oxides

Date

1994

Proceedings Paper

Simple item page Full metadata Statistics

Files

190.pdf 870.86 KB

Author(s)

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Verhaverbeke, Steven

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Schmidt, Harald

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Rotondaro, Antonio

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Metrics

2081 since deposited on 2021-09-29

Acq. date: 2025-12-28