Atomic layer deposition of high-k dielectrics on sulphur-passivated germanium

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Authors

Sioncke, Sonja; Lin, Dennis; Nyns, Laura; Brammertz, Guy; Delabie, Annelies; Conard, Thierry; Franquet, Alexis; Meuris, Marc; Struyf, Herbert; De Gendt, Stefan; Heyns, Marc; Fleischmann, Claudia; Temst, Kristiaan; Vantomme, Andre; Muller, Matthias; Kobe, Michael; Beckhoff, Burkhard; Caymax, Matty

ISSN

0013-4651

Issue

7

Journal

Journal of the Electrochemical Society

Volume

158

Title

Atomic layer deposition of high-k dielectrics on sulphur-passivated germanium

Publication type

Journal article

Embargo date

9999-12-31

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