Publication:
Atomic layer deposition of high-k dielectrics on sulphur-passivated germanium
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1968 since deposited on 2021-10-19
5last month
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Acq. date: 2026-01-09
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1968 since deposited on 2021-10-19
5last month
2last week
Acq. date: 2026-01-09
Citations