Publication:

Atomic layer deposition of high-k dielectrics on sulphur-passivated germanium

Date

2011
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

23248.pdf 2.93 MB

Author(s)

Sioncke, Sonja
;
Lin, Dennis  
;
Nyns, Laura  
;
Brammertz, Guy  
;
Delabie, Annelies  
;
Conard, Thierry  
;
Franquet, Alexis  
;
Meuris, Marc  
;
Struyf, Herbert  
;
De Gendt, Stefan  
;
Heyns, Marc  
;
Fleischmann, Claudia  
;
Temst, Kristiaan  
;
Vantomme, Andre  
;
Muller, Matthias
;
Kobe, Michael
;
Beckhoff, Burkhard
;
Caymax, Matty  

Journal

Journal of the Electrochemical Society

Abstract

Description

Metrics

Views

1968 since deposited on 2021-10-19
5last month
Acq. date: 2026-01-11

Citations

Metrics

Views

1968 since deposited on 2021-10-19
5last month
Acq. date: 2026-01-11

Citations