Publication:

Atomic layer deposition of high-k dielectrics on sulphur-passivated germanium

Date

2011

Journal article

Simple item page Full metadata Statistics

Files

23248.pdf 2.93 MB

Author(s)

;

;

;

;

Delabie, Annelies

;

Conard, Thierry

;

Franquet, Alexis

;

;

Struyf, Herbert

;

De Gendt, Stefan

;

;

Fleischmann, Claudia

;

Temst, Kristiaan

;

Vantomme, Andre

;

Muller, Matthias

;

;

Beckhoff, Burkhard

;

Journal

Journal of the Electrochemical Society

Statistics

1969 since deposited on 2021-10-19

Acq. date: 2026-02-28