Authors

Souriau, Laurent; Lazzarino, Frederic; Carbonell, Laure; Ciofi, Ivan; Verdonck, Patrick; de Marneffe, Jean-Francois; Baklanov, Mikhaïl

Conference

AVS 58th International Symposium and Exhibition

Title

Plasma-induced damage reduction in porous SiOCH dielectrics by replacement of H2 and N2 by CH2F2 and Ar in fluorocarbon based plasmas

Publication type

Meeting abstract