Authors

Suhard, Samuel; Sebaai, Farid; Pacco, Antoine; Veloso, Anabela; Carbonell, Laure; Claes, Martine; Struyf, Herbert; Mertens, Paul; De Gendt, Stefan

Conference

Electrochemical Society Fall Meeting Symposium E7 - Semiconductor Cleaning Science and Technology 12 - SCST 12

Title

Development of a wet silicon removal process for replacement metal gate and sacrificial fin

Publication type

Meeting abstract