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Plasma enhanced atomic layer deposited Ru for MIMCAP applications

dc.contributor.authorSwerts, Johan
dc.contributor.authorSalimullah, M.M.
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorKim, Min-Soo
dc.contributor.authorPawlak, Malgorzata
dc.contributor.authorDelabie, Annelies
dc.contributor.authorSchaekers, Marc
dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorKaczer, Ben
dc.contributor.authorOpsomer, Karl
dc.contributor.authorVrancken, Christa
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorAltimime, Laith
dc.contributor.authorKittl, Jorge
dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-19T19:25:28Z
dc.date.available2021-10-19T19:25:28Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19856
dc.sourceIIOimport
dc.titlePlasma enhanced atomic layer deposited Ru for MIMCAP applications
dc.typeProceedings paper
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage41
dc.source.endpage51
dc.source.conferenceAtomic Layer Deposition Applications 7
dc.source.conferencedate9/10/2011
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 41, issue 2


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