Wafer probing on fine-pitch micro-bumps for 2.5D- and 3D-SICs

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Authors
Thaerigen, Thomas; Kanev, Stojan; Kiesewetter, Joerg; Hanaway, Peter; Strid, Eric; Marinissen, Erik Jan; Dupas, Luc
Conference
Semicon 13th European Manufacturing Test Conference - EMTC
Title
Wafer probing on fine-pitch micro-bumps for 2.5D- and 3D-SICs
Publication type
Proceedings paper
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