Authors

Toledano Luque, Maria; Kaczer, Ben; Roussel, Philippe; Franco, Jacopo; Ragnarsson, Lars-Ake; Grasser, Tibor; Groeseneken, Guido

ISSN

0003-6951

Issue

18

Journal

Applied Physics Letters

Volume

98

Title

Depth localization of positive charge trapped in silicon oxynitride field effect transistors after positive and negative gate bias temperature stress

Publication type

Journal article

Embargo date

9999-12-31