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Evaluation of Mn-based Cu barriers for interconnect applications
Publication:
Evaluation of Mn-based Cu barriers for interconnect applications
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Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Besien, Els
;
Jourdan, Nicolas
;
Zhao, Larry
;
Croes, Kristof
;
Siew, Yong Kong
;
Van Elshocht, Sven
;
Tokei, Zsolt
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1953
since deposited on 2021-10-19
2
last month
Acq. date: 2025-12-10
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Metrics
Views
1953
since deposited on 2021-10-19
2
last month
Acq. date: 2025-12-10
Citations