Publication:
Pellicle contribution to optical proximity and critical dimension uniformity for 1.35 numerical aperture immersion ArF lithography
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1928 since deposited on 2021-10-19
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Acq. date: 2026-08-10
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Statistics
Views
1928 since deposited on 2021-10-19
2last month
1last week
Acq. date: 2026-08-10
Citations