Show simple item record

Analytical Electron Microscopy of Si1-xGex/Si Heterostructures and Local Isolation Structures

dc.contributor.authorArmigliato, A.
dc.contributor.authorBalboni, R.
dc.contributor.authorCorticelli, F.
dc.contributor.authorFrabboni, S.
dc.contributor.authorMalvezzi, F.
dc.contributor.authorVanhellemont, Jan
dc.date.accessioned2021-09-29T12:39:42Z
dc.date.available2021-09-29T12:39:42Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19
dc.sourceIIOimport
dc.titleAnalytical Electron Microscopy of Si1-xGex/Si Heterostructures and Local Isolation Structures
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conference1st International Conference on Materials for Microelectronics; October 17-19, 1994; Barcelona, Spain.
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record