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Conference contributions
Metal removal without particle addition: optimization of the dilute HCl clean
Publication:
Metal removal without particle addition: optimization of the dilute HCl clean
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Date
1994
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hurd, Trace
;
Mertens, Paul
;
Hall, L. H.
;
Heyns, Marc
Journal
Abstract
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2091
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Acq. date: 2025-12-22
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Metrics
Views
2091
since deposited on 2021-09-29
3
last month
1
last week
Acq. date: 2025-12-22
Citations