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Metal removal without particle addition: optimization of the dilute HCl clean
Publication:
Metal removal without particle addition: optimization of the dilute HCl clean
Date
1994
Proceedings Paper
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192.pdf
324.08 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hurd, Trace
;
Mertens, Paul
;
Hall, L. H.
;
Heyns, Marc
Journal
Abstract
Description
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2088
since deposited on 2021-09-29
Acq. date: 2025-11-06
Citations
Metrics
Views
2088
since deposited on 2021-09-29
Acq. date: 2025-11-06
Citations