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Use of gettering and defect induced processes in ultra-thin buried oxide synthesis

dc.contributor.authorLitovchenko, V. G.
dc.contributor.authorEfremov, A. A.
dc.contributor.authorRomanuk, B. N.
dc.contributor.authorMel'nik, V. P.
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-09-30T09:17:18Z
dc.date.available2021-09-30T09:17:18Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2000
dc.sourceIIOimport
dc.titleUse of gettering and defect induced processes in ultra-thin buried oxide synthesis
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage97
dc.source.endpage102
dc.source.conferenceProceedings of the 7th Conference on Gettering and Defect Engineering in the Semiconductor Technology - GADEST '97
dc.source.conferencedate5/10/1997
dc.source.conferencelocationSpa Belgium
imec.availabilityPublished - open access
imec.internalnotesSolid State Phenomena. Vols. 57-58


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