3D-doping in Finfets and nanowires : fabrication and metrology challenges and solutions

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Authors
Vandervorst, Wilfried; Schulze, Andreas; Eyben, Pierre; Zschaetzsch, Gerd; Koelling, Sebastian; Kumar, Arul; Mody, Jay; Gilbert, Matthieu
Conference
E-MRS Symposium I: Transport in Si-based Nanodevices
Title
3D-doping in Finfets and nanowires : fabrication and metrology challenges and solutions
Publication type
Oral presentation
Embargo date
9999-12-31
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