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3D-doping in Finfets and nanowires : fabrication and metrology challenges and solutions

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorSchulze, Andreas
dc.contributor.authorEyben, Pierre
dc.contributor.authorZschaetzsch, Gerd
dc.contributor.authorKoelling, Sebastian
dc.contributor.authorKumar, Arul
dc.contributor.authorMody, Jay
dc.contributor.authorGilbert, Matthieu
dc.date.accessioned2021-10-19T20:40:53Z
dc.date.available2021-10-19T20:40:53Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20015
dc.sourceIIOimport
dc.title3D-doping in Finfets and nanowires : fabrication and metrology challenges and solutions
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceE-MRS Symposium I: Transport in Si-based Nanodevices
dc.source.conferencedate9/05/2011
dc.source.conferencelocationNice France
imec.availabilityPublished - open access


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