Publication:
Patterning challenges in setting up a 16nm node 6T-SRAM device using EUV lithography
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1946 since deposited on 2021-10-19
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Acq. date: 2026-08-03
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1946 since deposited on 2021-10-19
4last month
1last week
Acq. date: 2026-08-03
Citations