TiSi2 and CoSi2: relevant materials issues for deep sub-micron technologies

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Authors
Maex, Karen; Howard, Dave; De Wolf, Ingrid; Steegen, An
Conference
Abstracts of the 4th International Workshop on Stress Induced Phenomena in Metallization
Title
TiSi2 and CoSi2: relevant materials issues for deep sub-micron technologies
Publication type
Proceedings paper
Embargo date
9999-12-31
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