Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Spacer defined double patterning for (sub-)20nm half pitch single damascene structures
View/
open
21343.pdf (1.441Mb)
Metadata
Show full item record
Authors
Versluijs, Janko
;
Siew, Yong Kong
;
Kunnen, Eddy
;
Vangoidsenhoven, Diziana
;
Demuynck, Steven
;
Wiaux, Vincent
;
Dekkers, Harold
;
Beyer, Gerald
Conference
Optical Microlithography XXIV
Title
Spacer defined double patterning for (sub-)20nm half pitch single damascene structures
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections
Conference contributions
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login