Si passivation for Ge pMOSFETs: impact of Si cap growth conditions

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Authors

Vincent, Benjamin; Loo, Roger; Vandervorst, Wilfried; Delmotte, Joris; Douhard, Bastien; Valev, Ventislav; Vanbel, Maarten; Verbiest, Thierry; Rip, Jens; Brijs, Bert; Conard, Thierry; Claypool, Chris; Takeuchi, Shotaro; Zaima, Shigeaki; Mitard, Jerome; De Jaeger, Brice; Dekoster, Johan; Caymax, Matty

ISSN

0038-1101

Issue

1

Journal

Solid-State Electronics

Volume

60

Title

Si passivation for Ge pMOSFETs: impact of Si cap growth conditions

Publication type

Journal article

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