Si passivation for Ge pMOSFETs: impact of Si cap growth conditions

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Author(s)

Vincent, Benjamin

;

;

Vandervorst, Wilfried

;

Delmotte, Joris

;

Douhard, Bastien

;

Valev, Ventislav

;

Vanbel, Maarten

;

Verbiest, Thierry

;

;

;

Conard, Thierry

;

Claypool, Chris

;

Takeuchi, Shotaro

;

Zaima, Shigeaki

;

;

De Jaeger, Brice

;

Dekoster, Johan

;

Journal

Solid-State Electronics

Metrics

1927 since deposited on 2021-10-19

Acq. date: 2025-10-27