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Metal removal without particle addition: optimization of the dilute HCl clean

dc.contributor.authorHurd, Trace
dc.contributor.authorMertens, Paul
dc.contributor.authorHall, L. H.
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-29T12:42:17Z
dc.date.available2021-09-29T12:42:17Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/200
dc.sourceIIOimport
dc.titleMetal removal without particle addition: optimization of the dilute HCl clean
dc.typeProceedings paper
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage41
dc.source.endpage45
dc.source.conferenceProceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
dc.source.conferencedate19/09/1994
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - open access


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