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Silicon nano-pillar test structures for quantitative evaluation of wafer drying induced pattern collapse
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Authors
Vos, Ingrid
;
Hellin, David
;
Vertommen, Johan
;
Demand, Marc
;
Boullart, Werner
Conference
Semiconductor Cleaning Science and Technology 12
Title
Silicon nano-pillar test structures for quantitative evaluation of wafer drying induced pattern collapse
Publication type
Proceedings paper
Embargo date
9999-12-31
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