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Process challenges of MEMS harvesters and their effect on harvester performance

dc.contributor.authorVullers, Ruud
dc.contributor.authorvan Schaijk, Rob
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorElfrink, Rene
dc.contributor.authorWang, Ziyang
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-19T21:35:20Z
dc.date.available2021-10-19T21:35:20Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20123
dc.sourceIIOimport
dc.titleProcess challenges of MEMS harvesters and their effect on harvester performance
dc.typeProceedings paper
dc.contributor.imecauthorElfrink, Rene
dc.contributor.imecauthorVan Hoof, Chris
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage231
dc.source.endpage234
dc.source.conferenceIEEE International Electron Devices Meeting - IEDM
dc.source.conferencedate5/12/2011
dc.source.conferencelocationWashington, CD USA
imec.availabilityPublished - open access


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