Growth of high quality InP layers in STI trenches on miscut Si (001) substrates

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Authors

Wang, Gang; Leys, Maarten; Nguyen, Duy; Loo, Roger; Brammertz, Guy; Richard, Olivier; Bender, Hugo; Dekoster, Johan; Meuris, Marc; Heyns, Marc; Caymax, Matty

ISSN

0022-0248

Issue

1

Journal

Journal of Crystal Growth

Volume

315

Title

Growth of high quality InP layers in STI trenches on miscut Si (001) substrates

Publication type

Journal article

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