dc.contributor.author | Wen, Liangong | |
dc.contributor.author | Guo, Bin | |
dc.contributor.author | Haspeslagh, Luc | |
dc.contributor.author | Severi, Simone | |
dc.contributor.author | Witvrouw, Ann | |
dc.contributor.author | Puers, Bob | |
dc.date.accessioned | 2021-10-19T21:47:39Z | |
dc.date.available | 2021-10-19T21:47:39Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20146 | |
dc.source | IIOimport | |
dc.title | Thin film encapsulated SiGe accelerometer for MEMS above IC integration | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Haspeslagh, Luc | |
dc.contributor.imecauthor | Severi, Simone | |
dc.contributor.imecauthor | Puers, Bob | |
dc.source.peerreview | no | |
dc.source.beginpage | 2046 | |
dc.source.endpage | 2049 | |
dc.source.conference | 16th International Conference on Solid-State Sensors, Actuators, and Microsystems - Transducers | |
dc.source.conferencedate | 5/06/2011 | |
dc.source.conferencelocation | Beijing China | |
imec.availability | Published - imec | |