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Thin film encapsulated SiGe accelerometer for MEMS above IC integration

dc.contributor.authorWen, Liangong
dc.contributor.authorGuo, Bin
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorSeveri, Simone
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorPuers, Bob
dc.date.accessioned2021-10-19T21:47:39Z
dc.date.available2021-10-19T21:47:39Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20146
dc.sourceIIOimport
dc.titleThin film encapsulated SiGe accelerometer for MEMS above IC integration
dc.typeProceedings paper
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorPuers, Bob
dc.source.peerreviewno
dc.source.beginpage2046
dc.source.endpage2049
dc.source.conference16th International Conference on Solid-State Sensors, Actuators, and Microsystems - Transducers
dc.source.conferencedate5/06/2011
dc.source.conferencelocationBeijing China
imec.availabilityPublished - imec


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